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PI Updates Objective Focusing Stages for Sub-Micrometer Precision

When depth of focus shrinks to mere micrometers, even a slight thermal drift or surface vibration can ruin a high-resolution measurement. PI’s latest objective focusing stages, featuring piezo and voice-coil drives, aim to lock onto targets with nanometer-level resolution despite the high throughput demands of modern microscopy and wafer inspection.

PI Updates Objective Focusing Stages for Sub-Micrometer Precision

Modern microscopes and metrology systems operate at magnifications where the margin for error is razor-thin. To combat image degradation, the Shrewsbury-based firm has deployed two distinct drive architectures: the P-725 piezo-driven stage for compact, high-speed response, and the V-308 voice-coil stage, which offers extended travel ranges up to 7mm. These mechanisms allow systems to maintain focus during rapid scanning, a necessity for accurate 3D surface reconstruction and large-scale biological imaging.

In the semiconductor sector, where the pressure to measure millions of microscopic features at high speeds is constant, these stages serve to minimize settling times and focus errors. However, hardware alone is insufficient. PI pairs these mechanisms with specialized digital motion controllers that utilize built-in linearization algorithms. By integrating benchtop or OEM controllers with these actuators, engineers can ensure that the nanometer-level precision of the mechanics is maintained across real-world, high-volume production environments.

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